• 专利标题:   Formation of graphene used for semiconductor device, solar cell and flat panel display device, involves introducing carbon-type gas to surface vicinity of base material and heat processing surface of base material.
  • 专利号:   JP2011207736-A
  • 发明人:   NAKASHIMA S, KATO S, UEHARA T, NAKANISHI K, MATSUMOTO M, FUKIDOME H, SUEMITSU M
  • 专利权人:   SEKISUI CHEM IND CO LTD, UNIV TOHOKU
  • 国际专利分类:   C01B031/04, C23C016/26, H05H001/24
  • 专利详细信息:   JP2011207736-A 20 Oct 2011 C01B-031/04 201169 Pages: 10 Japanese
  • 申请详细信息:   JP2011207736-A JP149151 30 Jun 2010
  • 优先权号:   JP056770

▎ 摘  要

NOVELTY - A carbon-type gas is introduced to surface vicinity of a base material (1) which is maintained at 600 degrees C or less under reduced environment. The surface (1a) of base material is heat processed at 100 degrees C or more for 5 mu seconds or less, to obtain graphene on base material. USE - Formation of graphene used for semiconductor device, solar cell and flat panel display device. ADVANTAGE - The method enables formation of graphene having uniform thickness on resin base material, at low temperature. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of the apparatus for forming graphene. (Drawing includes non-English language text) Base material (1) Surface (1a) Container (11) Ground electrode (12) High-voltage electrode (13)