▎ 摘　　要

NOVELTY - Growing of nitride on diamond involves preparing one group of diamond single crystal substrates and three groups of diamond polycrystalline polished substrates, preparing material of gallium nitride/graphene/diamond on diamond single crystal substrate, and preparing material of gallium nitrige/molybdenum sulfide/diamond on other three sets of diamond polycrystalline polished substrates. USE - Growing of nitride on diamond used for consumer electronics, Fifth generation (5G) communication device, cloud service, photovoltaic inverter, and new energy automobile. ADVANTAGE - The method solves the lattice mismatch and stress mismatch problem of nitride directly grown on the diamond, by the application, it can realize directly growing high quality nitride epitaxial material on diamond.