▎ 摘 要
NOVELTY - The Fano resonance modulator comprises a micro-ring resonator structure formed on the silicon-on-insulator base layer. The micro-ring resonator structure has a straight waveguide (101) and an annular waveguide (102). The coupling area of the straight waveguide is provided with multiple of air holes. A single layer graphene is paved by the silicon base layer on the insulator. The single layer graphene covered with the micro-ring resonator structure. USE - Graphene mixed silicon-based Fano resonance modulator for use in a test system (claimed) of an optoelectronic device in electronic. ADVANTAGE - The mixed silicon-based Fano resonance modulator has simple structure, small occupied space, easy production, and it can realize higher switching rate and modulation rate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a test system for test graphene of mixing silicon-based Fano resonance modulator. DESCRIPTION OF DRAWING(S) - The drawing shows a structural schematic view of the test system. (Drawing includes non-English language text). 100Silicon-on-insulator substrate 101Straight waveguide 102Annular waveguide 103Air hole 104First electrode 105Second electrode 106Single-layer graphene 200Laser 300Spectrometer 400Direct current power supply