• 专利标题:   Method for producing epitaxial graphene on silicon carbide substrate, involves reducing value of partial pressure of graphene is reduced to certain value, and etching substrate on graphene such that partial pressure of propane is increased.
  • 专利号:   PL398152-A1
  • 发明人:   STRUPINSKI W
  • 专利权人:   ISOS TECHNOLOGIES SARL
  • 国际专利分类:   C01B031/00, C01B031/04
  • 专利详细信息:   PL398152-A1 19 Aug 2013 C01B-031/04 201366 Pages: 1
  • 申请详细信息:   PL398152-A1 PL398152 17 Feb 2012
  • 优先权号:   PL398152

▎ 摘  要

NOVELTY - The method involves producing silicon carbide substrate in an atmosphere of hydrogen, argon and propane. Partial pressure of deposition graphene is reduced to certain value during epitaxial growth of hydrogen. A substrate is etched on the graphene such that partial pressure of propane is increased. USE - Method for producing epitaxial graphene on silicon carbide substrate.