• 专利标题:   Method for preparing graphene by chemical vapour deposition (CVD), involves depositing graphene on insulating or semiconducting inorganic substrate bringing gaseous oxidant and carbon-containing precursor into contact with substrate.
  • 专利号:   WO2017064113-A1, TW201723219-A
  • 发明人:   TOMOVIC Z, WEBER N, BINDER A, WAGNER N
  • 专利权人:   BASF SE
  • 国际专利分类:   B82Y030/00, B82Y040/00, C23C016/02, C23C016/26, C23C016/46, H01L021/205
  • 专利详细信息:   WO2017064113-A1 20 Apr 2017 B82Y-030/00 201730 Pages: 24 English
  • 申请详细信息:   WO2017064113-A1 WOEP074448 12 Oct 2016
  • 优先权号:   EP189986

▎ 摘  要

NOVELTY - The method involves providing and subjecting an insulating or semiconducting inorganic substrate in a CVD reactor to a thermal pre-treatment in a hydrogen-containing gas atmosphere. The graphene is deposited on the insulating or semiconducting inorganic substrate by bringing a gaseous oxidant and a carbon-containing precursor into contact with the insulating or semiconducting inorganic substrate. The inorganic substrate is present on a support element. The transition metal catalyst is not present in a CVD reactor. USE - Method for preparing graphene by CVD. ADVANTAGE - The high quality and high transmittance of graphene are realized. DESCRIPTION OF DRAWING(S) - The drawing shows the graphical view illustrating a method for preparing graphene.