• 专利标题:   Graphene electronic device e.g. FET, has graphene channel layer formed on gate insulating layer, source electrode formed on end of graphene channel layer, and drain electrode formed on another end of graphene channel layer.
  • 专利号:   US2012313079-A1, KR2012137053-A, JP2013004972-A, CN102820324-A, US8994079-B2, CN102820324-B, JP6130104-B2, KR1813179-B1
  • 发明人:   SONG H, CHO B, SEO S, SHIN W, SONG H J, CHO B J, SEO S A, SHIN W C, SONG C, SIN W
  • 专利权人:   KOREA ADV INST SCI TECHNOLOGY, SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD, KOREA ADV INST SCI TECHNOLOGY, SAMSUNG ELECTRONICS CO LTD, HANKOOK KAGAKU GIJUTSUIN, KOREA INST SCI TECHNOLOGY, SAMSUNG ELECTRONICS CO LTD, KOREA ADVANCED SCI TECHNOLOGY INST, SAMSUNG ELECTRONICS CO LTD, HANKOOK KAGAKU GIJUTSUIN, KOREA ADVANCED INST SCI TECHNOLOGY
  • 国际专利分类:   H01L029/775, H01L021/336, H01L029/78, H01L029/786, H01L051/05, H01L051/30, H01L029/10, H01L029/16, H01L029/51, H01L029/76, H01L029/778
  • 专利详细信息:   US2012313079-A1 13 Dec 2012 H01L-029/775 201301 Pages: 10 English
  • 申请详细信息:   US2012313079-A1 US491999 08 Jun 2012
  • 优先权号:   KR056341

▎ 摘  要

NOVELTY - The device (300) has a conductive substrate (310) functioning as a gate electrode (370). A multi-layered gate insulating layer (360) is formed on the conductive substrate, and includes an inorganic insulating layer (361) and an organic insulating layer (362). A graphene channel layer (330) is formed on the gate insulating layer. A source electrode (341) is formed on an end of the graphene channel layer, and a drain electrode (342) is formed on another end of the graphene channel layer. The organic insulating layer is placed between the inorganic insulating layer and the graphene channel layer. USE - Graphene electronic device e.g. FET (claimed). Can also be used as a radio frequency transistor. ADVANTAGE - The organic insulating layer is formed between the graphene channel layer and the inorganic insulating layer, so that carrier mobility of the graphene channel layer is reduced. The organic insulating layer prevents or reduces presence of a foreign material at an interface between the inorganic insulating layer and the graphene channel layer, and can be formed of a polymer insulating layer with strong hydrophobic characteristic in order to prevent or reduce the absorption of water molecules that cause hole doping in the graphene channel layer. DETAILED DESCRIPTION - The graphene channel layer is a nano-ribbon graphene channel layer. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a graphene electronic device. Graphene electronic device (300) Conductive substrate (310) Graphene channel layer (330) Source electrode (341) Drain electrode (342) Multi-layered gate insulating layer (360) Inorganic insulating layer (361) Organic insulating layer (362) Gate electrode (370)