• 专利标题:   Construction of high-sensitivity near infrared photoelectric detector involves preparing gallium arsenide film or gallium arsenide wafer, placing graphene/gallium arsenide sample, annealing, and fabricating electrode on processed samples.
  • 专利号:   CN112038447-A
  • 发明人:   CUI D, CAI B, WANG D, JIN C
  • 专利权人:   SHANGHAI NAT ENG RES CENT NANOTECHNOLOGY
  • 国际专利分类:   H01L031/0336, H01L031/109, H01L031/18
  • 专利详细信息:   CN112038447-A 04 Dec 2020 H01L-031/18 202101 Pages: 9 Chinese
  • 申请详细信息:   CN112038447-A CN10796425 10 Aug 2020
  • 优先权号:   CN10796425

▎ 摘  要

NOVELTY - Construction of high-sensitivity near infrared photoelectric detector involves (i) transferring graphene film prepared by chemical vapor deposition to gallium arsenide film and/or gallium arsenide wafer to obtain graphene/gallium arsenide sample, (ii) placing the graphene/gallium arsenide sample on the heating plate and heating at 45-70 degrees C for pre-processing, (iii) placing the graphene/gallium arsenide sample into a vacuum oven and annealing at 60-150 degrees C to obtain the processed sample, and (iv) fabricating electrode on the processed samples. The method involves using graphene/gallium arsenide composite structure to effectively absorb near-infrared light, efficiently separating photoinduced excitons and gallium arsenide doping effects on graphene, controlling device pretreatment, and annealing temperature and time for interface and material optimization. USE - Construction of high-sensitivity near-infrared photoelectric detector (claimed). ADVANTAGE - The method enables construction of high-sensitivity near infrared photoelectric detector with quickly responding to the near infrared light.