• 专利标题:   Extension of graphene from hexagonal phase ultrathin silicon carbide film on insulating underlay comprises subjecting insulating underlay to pre-treatment, attaching silicon carbide, and extending hexagonal phase monocrystal silicon carbide.
  • 专利号:   CN101492835-A
  • 发明人:   CENG Y, JI G, LI J, LIU X, SUN G, WANG L, YANG T, ZHAO W, ZHAO Y
  • 专利权人:   CHINESE ACAD SCI SEMICONDUCTOR INST
  • 国际专利分类:   C30B029/02
  • 专利详细信息:   CN101492835-A 29 Jul 2009 C30B-029/02 200954 Pages: 14 Chinese
  • 申请详细信息:   CN101492835-A CN10056727 24 Jan 2008
  • 优先权号:   CN10056727

▎ 摘  要

NOVELTY - Extension of graphene from hexagonal phase ultrathin silicon carbide film on insulating underlay comprises subjecting insulating underlay to pre-treatment of etching at high temperature using hydrogen to remove scratch on surface and to etch surface to smoothness; subjecting to high-temperature nitrogen treatment to activate epitaxial surface, attaching silicon carbide on surface of underlay and providing with same crystallographic orientation relation with underlay; and extending hexagonal phase monocrystal silicon carbide and vaporizing silicon atoms within silicon carbide. USE - Method for extension of graphene from hexagonal phase ultrathin silicon carbide film on insulating underlay (claimed).