• 专利标题:   Method for preparing substrate of graphene thin film semiconductor device, involves providing metal catalyst layer with substrate, and forming tape clipping layer and adhesive tape layer on organic colloid layer.
  • 专利号:   CN102592964-A, CN102592964-B
  • 发明人:   GUO J, JIN Z, MA P, WANG X
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/02
  • 专利详细信息:   CN102592964-A 18 Jul 2012 H01L-021/02 201262 Pages: 10 Chinese
  • 申请详细信息:   CN102592964-A CN10002388 07 Jan 2011
  • 优先权号:   CN10002388

▎ 摘  要

NOVELTY - The method involves forming an organic colloid layer on a graphene thin film surface. A graphene thin film is arranged on a target substrate e.g. semiconductor substrate, an oxide substrate, a plastic substrate or glass substrate, that is provided with a metal catalyst layer. A tape clipping layer and an UV adhesive tape layer are formed on the organic colloid layer. The metal catalyst layer is made of nickel or copper. USE - Method for preparing a substrate of a graphene thin film semiconductor device. ADVANTAGE - The method enables improving graphene oxide film transferring efficiency and simplifying operation process. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for preparing a substrate of a graphene thin film semiconductor device.'(Drawing includes non-English language text)'