• 专利标题:   Fabricating semiconductor device package, involves forming carbon-based material on sacrificial substrate, inverting sacrificial substrate, bonding sacrificial substrate to wafer comprising semiconductor device components, and removing sacrificial substrate to leave carbon-based material over wafer.
  • 专利号:   US2021057342-A1
  • 发明人:   NAKANO E
  • 专利权人:   MICRON TECHNOLOGY INC
  • 国际专利分类:   H01L023/532, H01L023/538, H01L025/11
  • 专利详细信息:   US2021057342-A1 25 Feb 2021 H01L-023/538 202132 English
  • 申请详细信息:   US2021057342-A1 US076602 21 Oct 2020
  • 优先权号:   US236681, US076602

▎ 摘  要

NOVELTY - Fabricating (M1) a semiconductor device package (100), comprises: forming a carbon-based material (104) on a sacrificial substrate; inverting the sacrificial substrate; bonding the sacrificial substrate to a wafer comprising semiconductor device components; and after the bonding, removing the sacrificial substrate to leave the carbon-based material over the wafer. USE - The method is useful for fabricating semiconductor device package. ADVANTAGE - The method provides the semiconductor device packages which exhibits a very low height form factor, enabling improved scaling in three-dimensional stacks that include such packages. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: (a) fabricating (M2) a semiconductor device package; and (b) a device package, comprising a redistribution layer (102) comprising conductive elements comprising a conductive carbon-based material defining a vertical height, between a lower surface and an upper surface of the conductive carbon-based material, of less than 0.2 microm, passivation material (114) laterally between and partially overlapping the upper surface of the conductive elements, where the passivation material defines openings extending therethrough to the conductive elements, and a device region directly adjacent the conductive carbon-based material of the conductive elements of the redistribution layer. DESCRIPTION OF DRAWING(S) - The figure shows a cross-sectional, elevational, schematic view of the semiconductor device package. Device package (100) Redistribution layer (102) Carbon-based material (104) Surface (109) Passivation material (114)