▎ 摘　　要

NOVELTY - A composite substrate is provided in some embodiments of the present disclosure, including a graphene layer, a silicon carbide layer, a first silicon substrate, an insulation layer and a second silicon substrate. The silicon carbide layer is disposed on the graphene layer. The first silicon substrate is disposed on the silicon carbide layer. The insulation layer is disposed on the first silicon substrate. The second silicon substrate is disposed on the insulation layer. A method of manufacturing a composite substrate is further provided in some embodiments of the present disclosure.