▎ 摘 要
NOVELTY - The device comprises an anode (110) and a cathode (120) that are arranged in a vacuum-holding container (130), where the cathode over a part of its extent is separated from the anode by a vacuum gap, and a first grid (112) configured to modulate a flow of electrons between the cathode and the anode in a device operation, where the first grid is made of graphene material. Grid and anode voltages relative to the cathode for the device operation are in a range of 0-20 V. The first grid is suspended between the cathode and the anode without physically contacting the cathode or the anode. USE - The device is useful as an electronic device (claimed) such as multi-electrode electronic device including microelectronic or nanoelectronic device. ADVANTAGE - The device includes the control grid arranged sufficiently close to the cathode to induce or suppress electron emission from the cathode when a suitable electric potential is applied to the grid in the device operation. The gas pressure in the container can be sufficiently low so that a combination of low gas density and small inter-component separations reduces likelihood of gas interactions with transiting electrons to low enough levels thus optimizing vacuum-like performance. DETAILED DESCRIPTION - The device comprises an anode (110) and a cathode (120) that are arranged in a vacuum-holding container (130), where the cathode over a part of its extent is separated from the anode by a vacuum gap, and a first grid (112) configured to modulate a flow of electrons between the cathode and the anode in a device operation, where the first grid is made of graphene material. Grid and anode voltages relative to the cathode for the device operation are in a range of 0-20 V. One of the cathode and the anode comprises field enhancement features. The first grid is suspended between the cathode and the anode without physically contacting the cathode or the anode. The first grid is arranged at a closer distance to the anode than a distance to the cathode and is configured to predominantly control the flow of electrons into the anode over control of the flow of electrons out of the cathode when an electric potential is applied to the first grid in the device operation. The device further comprises: a second grid (114) in addition to the first grid; and a circuitry configured to impose an electrical potential between the cathode and the anode. The first grid is: configured to act as a screen grid to reduce parasitic capacitance and oscillations; arranged sufficiently close to the anode to induce electron emission from the anode when an electric potential is applied to the first grid in device operation; and configured to act as an acceleration grid to accelerate a flow of electrons between the cathode and anode. The graphene material of the first grid is transparent to the flow electrons from the cathode to the anode and includes a graphene sheet with physical pores with carbon atoms. The pores in the graphene sheet are aligned with field emitter tips on the cathode or the anode and lithographically formed. The graphene material is arranged over a surface of the anode or the cathode. A separation distance between the graphene material and the surface of the anode or the cathode is less than 0.1 mu m. The device further comprises a scaffolding configured to physically support the graphene material over the surface of the anode or the cathode. The scaffolding comprises an array of spacers or support posts. The spacers include dielectrics, oxides, polymers, insulators and glassy material. The graphene material is supported by an intervening dielectric material layer arranged on the surface of the anode or the cathode. The intervening dielectric material layer allows transmission of the electron flow. The anode modulates or changes an energy barrier to a flow of electrons through a surface of the cathode and/or the anode, and is made of a two-dimensional layered material having an electron transmission probability for 1 eV electrons that exceeds 0.25 and an electronic bandgap to permit transmission of the electron flow in the device operation. The dielectric material layer arranged over the surface of the cathode is a porous dielectric material layer configured to permit formation of vacuum gaps between the cathode and the anode. The material of the anode has pores permitting chemical etching to remove portions of the dielectric material. An INDEPENDENT CLAIM is included for a method for configuring a multi-electrode electronic device. DESCRIPTION OF DRAWING(S) - The diagram shows a schematic view of a multi-electrode electronic device. Anode (110) First grid (112) Second grid (114) Cathode (120) Vacuum-holding container. (130)