▎ 摘　　要

NOVELTY - The new type utility claims have one plant chemistry gas phase deposition method used for transfer the graphene thin film and tool system, comprising a bottom plate, the bottom plate and fixedly connected with the fixing column, a gasket, a upper clamp and the funnel, the gasket can be fixed through post, used for separating the graphene thin film supporting layer, the place at the top of the cover plate fixing column, when matching is used for the funnel shove aside column clamp for preventing corrosion in catalytic base, a clamp floating to corrosion liquid liquid side, the funnel and the cover plate comprises tank body and fixed fixing plate and box body, the box body set with leakage holes, the fixing plate set with machine hand hook hole and shove aside cylinder mounting hole, the bottom plate, a fixture bottom plate and fixedly connected with the fixing column, a gasket and cover plate assembled form is set at the box body internal is the funnel. The utility model is new type can at the same time with the graphene thin film to more growing of the catalytic substrate for etching, increase production efficiency, when at the same time through the funnel and the cover plate can be matched to avoid clamp for etching in catalytic base, a clamp float in corrosion liquid liquid face at the information.