• 专利标题:   Graphene-copper target material comprises target assembly includes outer copper back plate provided with groove and graphene copper target main body whose outer wall provided with graphene plating layer.
  • 专利号:   CN113106401-A
  • 发明人:   LI G, ZHANG C
  • 专利权人:   SUZHOU GAOSONG YEGANG GRAPHENE NEW MATER
  • 国际专利分类:   C23C014/14, C23C014/34
  • 专利详细信息:   CN113106401-A 13 Jul 2021 C23C-014/34 202161 Pages: 6 Chinese
  • 申请详细信息:   CN113106401-A CN10362809 02 Apr 2021
  • 优先权号:   CN10362809

▎ 摘  要

NOVELTY - Graphene-copper target material comprises a target assembly (1). The target assembly comprises an outer copper back plate (2) and a graphene copper target main body (3). The outer copper back plate is provided with a groove (4). The graphene copper target main body (3) outer wall is provided with a graphene plating layer (5). USE - Used as graphene-copper target material. ADVANTAGE - The graphene-copper target material has high strength and stable performance. The method: adjusts the structure and photoelectric performance of the copper target material, improves the performance of the copper target, ensures the reliability and anti-interference performance of the copper target, improves the high conductivity and high temperature stress resistance of the target; and has simple process and low production cost, and is suitable for industrial production. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for preparing the graphene-copper target material. The method utilizes high-purity graphene, copper powder, argon gas, DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the graphene-copper target material. Target assembly (1) Outer copper back plate (2) Graphene copper target main body (3) Groove (4) Graphene plating layer (5)