▎ 摘 要
NOVELTY - The utility model claims a high sensitive capacitance type flexible pressure sensor, comprising a PDMS flexible polymer substrate, the PDMS flexible polymer substrate is provided with a graphene electrode layer, one side of the PDMS flexible polymer substrate corresponding to the graphene electrode layer is provided with a first micro structure; between the graphene electrode layer is provided with a first dielectric layer and a second dielectric layer; one side of the first dielectric layer corresponding to the second dielectric layer is provided with a second micro-structure; the first dielectric layer comprises a PDMS flexible polymer. By using the technical solution, the flexible polymer substrate and the dielectric layer of the utility model are provided with sensitive micro-structure; compared with the capacitance type flexible pressure sensor without micro-structure or single micro-structure, when subjected to external pressure, it is easier to form deformation; the change amplitude of the capacitance value is improved; finally, the capacitance type flexible pressure sensor with high sensitivity can be prepared.