• 专利标题:   High sensitive capacitance type flexible pressure sensor used in artificial skin, has first dielectric layer whose one side corresponding to second dielectry layer is provided with second micro-structure.
  • 专利号:   CN214621544-U
  • 发明人:   ZHANG C, LIAO N, WEI G
  • 专利权人:   UNIV WENZHOU
  • 国际专利分类:   G01L001/14
  • 专利详细信息:   CN214621544-U 05 Nov 2021 G01L-001/14 202212 Chinese
  • 申请详细信息:   CN214621544-U CN20942955 30 Apr 2021
  • 优先权号:   CN20942955

▎ 摘  要

NOVELTY - The utility model claims a high sensitive capacitance type flexible pressure sensor, comprising a PDMS flexible polymer substrate, the PDMS flexible polymer substrate is provided with a graphene electrode layer, one side of the PDMS flexible polymer substrate corresponding to the graphene electrode layer is provided with a first micro structure; between the graphene electrode layer is provided with a first dielectric layer and a second dielectric layer; one side of the first dielectric layer corresponding to the second dielectric layer is provided with a second micro-structure; the first dielectric layer comprises a PDMS flexible polymer. By using the technical solution, the flexible polymer substrate and the dielectric layer of the utility model are provided with sensitive micro-structure; compared with the capacitance type flexible pressure sensor without micro-structure or single micro-structure, when subjected to external pressure, it is easier to form deformation; the change amplitude of the capacitance value is improved; finally, the capacitance type flexible pressure sensor with high sensitivity can be prepared.