• 专利标题:   Rapid heating and embossing on surface of micro-nano structure using tantalum coating comprises processing micro-nano optical structure, adding layer of graphene, adding metal tantalum and graphene, combining and energizing.
  • 专利号:   CN111423100-A
  • 发明人:   ZHOU T, WANG Z, ZHU Z, WANG G, RUAN B, LIU P, LIU Z, LIANG Z, WANG X
  • 专利权人:   BEIJING INST TECHNOLOGY
  • 国际专利分类:   C03B011/08
  • 专利详细信息:   CN111423100-A 17 Jul 2020 C03B-011/08 202061 Pages: 8 Chinese
  • 申请详细信息:   CN111423100-A CN10248319 01 Apr 2020
  • 优先权号:   CN10248319

▎ 摘  要

NOVELTY - Rapid heating and embossing on surface of micro-nano structure using tantalum coating comprises (1) processing micro-nano optical structure on the surface of the mold, (2) adding layer of graphene on the surface of the mold, (3) adding another layer of metal tantalum and graphene and combining tantalum at high temperature to form tantalum carbide film and (4) energizing tantalum carbide film to complete the production and use of the auxiliary heating coating during the glass molding. USE - The method is useful for rapid heating and embossing on surface of micro-nano structure using tantalum coating. ADVANTAGE - The method: can realize the processing of high-precision micro-nano array optical structure; and has high processing efficiency, low manufacturing cost, long mold life and extremely high application value.