• 专利标题:   On-chip optical acetone gas sensor, has gas-sensitive film comprising layered film of polyethylene imine and Aminated graphene.
  • 专利号:   CN113740300-A
  • 发明人:   YU P, NIU H, WANG Z
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   B81B001/00, B81C001/00, G01N021/45
  • 专利详细信息:   CN113740300-A 03 Dec 2021 G01N-021/45 202214 Chinese
  • 申请详细信息:   CN113740300-A CN10993986 27 Aug 2021
  • 优先权号:   CN10993986

▎ 摘  要

NOVELTY - The on-chip optical acetone gas sensor comprises a substrate layer, a waveguide lower cladding layer, a waveguide core layer, a waveguide upper cladding sheet, and a gas-sensitive film. The film provides a layered film of polyethylene imine and Aminated graphene. The substrate layer is made of silicon material. The waveguide lower cladding is made of silicon dioxide material. The waveguide core layer is made of silicon nitride material. The upper cladding of the waveguide is made of silicon dioxide material. USE - On-chip optical acetone gas sensor for early detection of diabetes and early treatment. Uses include but are not limited to pressure detection, gas, detection of volatile organic compound, DNA/RNA, proteins, and other bio-molecules. ADVANTAGE - The on-chip optical acetone gas sensor solves the problem that the traditional electrochemical acetone sensor has limited sensitivity, bad stability, severe use condition and so on, providing a higher sensitivity, smaller volume, stronger anti-interference ability of the optical Acetone gas sensor and preparation technique and application. The sensor uses Mach-Zehnder interferometer to sensitive the micro refractive index change property, which greatly improves the sensitivity and detection limit of the sensor. The gas-sensitive film has good repeatability and stability. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: (a) a preparation technique for the on-chip optical acetone gas sensor for providing a substrate layer of silicon material; (b) an application for the on-chip optical acetone gas sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the on-chip optical acetone gas sensor. (Drawing includes non-English language text).