▎ 摘　　要

NOVELTY - Manufacturing electrostatic chuck, involves (a) preparing a composite powder by ball-milling (i) aluminum or aluminum alloy powder and (ii) carbon-based material powder, (b) manufacturing a multilayer billet, comprises a core layer and one or more shell layers surrounding the core layer, where one layer among the core layer and the one or more shell layers comprises the composite powder, (c) extruding the multilayer billet to form an electrode layer, and (d) forming a dielectric layer on the electrode layer. USE - Method for manufacturing electrostatic chuck having high heat dissipation property, high resistance to thermal shock, and lightness. ADVANTAGE - The method enables to manufacture an electrostatic chuck having good durability even in a harsh environment, also having a high heat dissipation property and high thermal shock resistance, and being lightweight, and dramatically improves efficiency of production of semiconductor devices. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an electrostatic chuck manufactured by the method.