• 专利标题:   Forming a multi-layered graphene window comprises selecting a metal foil having a first face and a second face, growing a first layer of graphene on the first face of the metal foil to form a graphene-modified foil, and patterning.
  • 专利号:   WO2012088274-A1, EP2655246-A1, US2014021165-A1, US2014021163-A1, US8778197-B2, EP2655246-B1, EP2853513-A1
  • 发明人:   EVERETT W N, PINKERTON J F, LACKOWSKI W M
  • 专利权人:   CLEAN ENERGY LABS LLC, CLEAN ENERGY LABS LLC, EVERETT W N, PINKERTON J F, LACKOWSKI W M, CLEAN ENERGY LABS LLC
  • 国际专利分类:   B81C001/00, C01B031/04, H01B013/00, H05K003/46
  • 专利详细信息:   WO2012088274-A1 28 Jun 2012 B81C-001/00 201244 Pages: 47 English
  • 申请详细信息:   WO2012088274-A1 WOUS066497 21 Dec 2011
  • 优先权号:   US427011P, US14006045, US039707

▎ 摘  要

NOVELTY - A method comprises: (a) selecting a metal foil having a first face and a second face, where the metal foil is a high purity metal foil; (b) growing a first layer of graphene on the first face of the metal foil to form a graphene-modified foil; (c) patterning the second face of the graphene-modified foil with a polymer; (d) etching the second face of the graphene-modified foil in the exposed region until exposing the first layer of graphene. USE - The methods are useful for forming a multi-layered graphene window; and for forming a graphene electromechanical assembly (all claimed). ADVANTAGE - The methods efficiently produces graphene windows which is transferable to another substrate (such as the metal-oxide portion of a graphene-drum switch) without the use of liquid (which tends to tear the graphene when the liquid dries). Also, the graphene windows are larger and cleaner. DETAILED DESCRIPTION - A method comprises: (a) selecting a metal foil having a first face and a second face, where the metal foil is a high purity metal foil; (b) growing a first layer of graphene on the first face of the metal foil to form a graphene-modified foil, where the second face of the graphene-modified foil is selected from: (i) a second layer of graphene on the second face of the metal foil, where the second layer of graphene was grown during the step of growing the first layer of graphene, and (ii) the second face of the metal foil; (c) patterning the second face of the graphene-modified foil with a polymer, where the second face of the graphene-modified foil has an exposed region; (d) etching the second face of the graphene-modified foil in the exposed region until exposing the first layer of graphene, where a graphene window is formed. INDEPENDENT CLAIMS are: (1) a method of forming a multi-layered graphene window, comprising: (a) forming a graphene-modified foil having a first graphene window; (b) transferring a second graphene window and placing it on top of the first graphene window to form a multi-layered graphene window having two layers of graphene; (2) a method of forming a graphene electromechanical assembly, comprising: (a) growing graphene on a substrate to create a graphene-substrate assembly; (b) partially etching the substrate of the graphene-substrate assembly to create a graphene window assembly; (c) forming an insulator-conductor assembly with an array of etched features; and (d) joining the graphene window assembly with the insulator-conductor assembly; (3) a composition made by the method; (4) a device that comprises the composition, and that performs the method; and (5) an assembly that is made by the method.