• 专利标题:   Graphene surface plasma modification processing device comprises a vacuum chamber provided with an inflation hole and an air suction hole, a glass container, radio frequency power supply system, a counter electrode and a rotating mechanism.
  • 专利号:   CN110357085-A, CN110357085-B
  • 发明人:   ZHANG B, JIN X, ZHU L, YU W, MA W, NIE J, LIU K
  • 专利权人:   CHANGZHOU VOCATIONAL MECHATRONIC TECHNOL
  • 国际专利分类:   C01B032/194
  • 专利详细信息:   CN110357085-A 22 Oct 2019 C01B-032/194 201985 Pages: 7 Chinese
  • 申请详细信息:   CN110357085-A CN10753605 15 Aug 2019
  • 优先权号:   CN10753605

▎ 摘  要

NOVELTY - Graphene surface plasma modification processing device comprises a vacuum chamber (1), a glass container (2), a radio frequency power supply system (9), a counter electrode (10) and a rotating mechanism. The vacuum chamber is a horizontal structure provided with an inflation hole (5) and an air suction hole. The counter electrode is connected to the RF power system. The counter electrode has a circular arc structure. A inner arc portion is a discharge layer. A middle portion is an insulation layer. A outer arc portion is a shield layer. A counter electrode is a cylindrical glass container is placed in the middle. The counter electrode is fixed to the inner wall of the vacuum chamber by a polytetrafluoroethylene block and coaxial with the center of the glass container. The glass container is connected to a rotating mechanism, and one end of the glass container is provided with a through hole. USE - Used as graphene surface plasma modification processing device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for processing graphene surface plasma modification processing device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the graphene surface plasma modification processing device. Vacuum chamber (1) Glass container (2) Inflation hole (5) Radio frequency power supply system (9) Counter electrode (10)