• 专利标题:   Method for manufacturing flexible pressure sensor, involves attaching pressure sensing unit to electrode in which electrode positive end and electrode negative end of electrode are electrically conducted through sensing unit.
  • 专利号:   CN116033818-A
  • 发明人:   LIN R, LIU M, LIU R
  • 专利权人:   UNIV TSINGHUA
  • 国际专利分类:   G01L001/18, H10N030/00, H10N030/03, H10N030/09, H10N030/85
  • 专利详细信息:   CN116033818-A 28 Apr 2023 H10N-030/09 202342 Chinese
  • 申请详细信息:   CN116033818-A CN11690103 27 Dec 2022
  • 优先权号:   CN11690103

▎ 摘  要

NOVELTY - The flexible pressure sensor manufacturing method involves attaching a film-shaped carbon precursor (1) to a side surface of a flexible substrate (2). A first laser is used to irradiate the carbon precursor to form a graphene layer. A pressure sensing unit (3a) is attached to an electrode. An electrode positive end and an electrode negative end of the electrode are electrically conducted through the pressure sensing unit. USE - Method for manufacturing flexible pressure sensor. ADVANTAGE - The manufacturing method of flexible pressure sensor is easy to realize the attaching-inducing-separating-attaching step, fast and efficiently obtains the reliable multi-scale micro-structure based on graphene flexible pressure sensors, greatly simplifies the processing technique and shortens the processing time, which is good for large-scale industrial production, it completely keeps the whole microstructure of the laser induced graphene that has a surface topography and internal structure, the application low cost, fast laser scanning mode to obtain microstructures of each scale, thus completely keeping the laser-induced graphene topography, and the flexible pressure sensing has high sensitivity, and wide sensing range. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a flexible pressure sensor manufactured by the manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a flexible pressure sensor. 1Film-shaped carbon precursor 2Flexible substrate 3Pressure sensitive array 3aPressure sensing unit