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  • 专利标题:   Composite thin film comprises graphene thin film and parylene thin film, where parylene thin film is set on graphene thin film, and parylene thin film comprises parylene, 2,5-dichloro-p-xylene and poly-para-xylylene.
  • 专利号:   CN104480450-A
  • 发明人:   GAO X, DU C, JIANG H, LI Z, SHI H, ZHANG Y, ZHU P, HUANG D
  • 专利权人:   CHONGQING MOXI TECHNOLOGY CO LTD, CHINESE ACAD SCI CHONGQING GREEN INTEL
  • 国际专利分类:   C23C016/01, C23C016/06, C23C016/44
  • 专利详细信息:   CN104480450-A 01 Apr 2015 C23C-016/06 201540 Pages: 7 Chinese
  • 申请详细信息:   CN104480450-A CN10764347 12 Dec 2014
  • 优先权号:   CN10764347

▎ 摘　　要

NOVELTY - Composite thin film comprises graphene thin film (2) and parylene thin film (3), where parylene thin film is set on graphene thin film. USE - Composite thin film. ADVANTAGE - The composite thin film has electric property. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing composite thin film, which involves: (A) depositing graphene thin film on the metal substrate; (B) providing substrate with poly-para-xylylene derivative; and (C) separating out metal growing substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a composite thin film. Graphene thin film (2) Parylene thin film (3)