▎ 摘　　要

NOVELTY - The sensor has a substrate (1) arranged with a lower interdigital electrode pair (2) and formed with a temperature sensitive oxidation graphene layer (3) and a lower isolating layer (4). A middle electrode (5) is formed with an upper isolating layer (6). A humidity sensitive oxidation graphene layer (8) is connected with the lower interdigital electrode pair. The upper isolation layer is connected with the lower isolating layer. The temperature sensitive oxidation graphene layer is connected with a temperature sensitive capacitor that is connected with a humidity sensitive capacitor. USE - Graphene oxide based three dimensional integrated capacitor type temperature and humidity sensor. ADVANTAGE - The sensor prevents temperature sensitive oxidation graphene product from moisture impact. The temperature sensitive capacitor and the humidity sensitive capacitor are formed as a three dimensional laminated integrated layer structure so that accommodation space can be reduced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene oxide based three dimensional integrated capacitor type temperature and humidity sensor preparation method. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram of a graphene oxide based three dimensional integrated capacitor type temperature and humidity sensor. ' Substrate (1) Lower interdigital electrode pair (2) Temperature sensitive oxidation graphene layer (3) Lower isolating layer (4) Middle electrode (5) Upper isolating layer (6) Humidity sensitive oxidation graphene layer (8)