• 专利标题:   Manufacturing multilayer graphene for multilayer graphene laminated body used for electronic devices involves layer replacement process which crystallizes carbon film and carries out layer replacement of metal film and carbon film.
  • 专利号:   JP2018035010-A
  • 发明人:   TOKO K, SUEMASU T
  • 专利权人:   UNIV TSUKUBA
  • 国际专利分类:   C01B032/15, C01B032/18, C01B032/182
  • 专利详细信息:   JP2018035010-A 08 Mar 2018 C01B-032/15 201821 Pages: 13 Japanese
  • 申请详细信息:   JP2018035010-A JP167043 29 Aug 2016
  • 优先权号:   JP167043

▎ 摘  要

NOVELTY - A multilayer graphene (3B) is manufactured by metal film formation process which does not form carbon and compound but forms metal film (2) on arbitrary board (1) by forming into film a metal which can dissolve carbon with active substance, carbon film formation process which forms amorphous carbon film (3A) into film on metal film, layer replacement process which crystallizes carbon film while board, metal film and carbon film are laminated in this order and heated and carries out layer replacement of metal film and carbon film, and removal process which removes metal film exposed to surface. USE - Manufacture of multilayer graphene for multilayer graphene laminated body (claimed) used for electronic devices, such as electrode of integrated circuit and electrode of heat spreader and storage battery. ADVANTAGE - Multilayer graphene can be manufactured with layer replacement system. DETAILED DESCRIPTION - A multilayer graphene (3B) is manufactured by metal film formation process which does not form carbon and compound, but forms metal film (2) on arbitrary board (1) by forming into film a metal which can dissolve carbon with active substance, carbon film formation process which forms amorphous carbon film (3A) into film on metal film, layer replacement process which crystallizes carbon film while board, metal film, and carbon film are laminated in this order and laminated body (5) is heated and carries out layer replacement of metal film and carbon film, and removal process which removes metal film exposed to surface according to layer replacement process. An INDEPENDENT CLAIM is included for multilayer graphene laminated body comprising board with allowable temperature limit of less than or equal to 600 degrees C and multilayer graphene which is formed on board in which number of layers of multilayer graphene is greater than or equal to 10 layers. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the manufacture of multilayer graphene. Board (1) Metal film (2) Carbon film (3A) Multilayer graphene (3B) Laminated body (5)