▎ 摘　　要

NOVELTY - The method involves depositing an isolation layer with an upper part of a sacrificial layer. A metal interconnection layer is arranged with the isolation layer through the sacrifice layer. An edge of the sacrificial layer is arranged with the isolation layer. The isolation layer is arranged with a lower electrode. Sensor substrate etching process is performed. A sensor substrate is formed with a cavity. A graphene film is fixed with a MEMS acoustic sensor of an upper electrode and a lower electrode. The metal interconnection layer is arranged with the lower electrode. USE - Method for manufacturing a MEMS acoustic sensor based on graphene (claimed). ADVANTAGE - The method enables improving performance of the MEMS acoustic sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a MEMS acoustic sensor.