• 专利标题:   Method for forming one-to-four-monolayer graphene layer on metal layer in manufacturing, e.g., magnetic tunnel junction (MTJ) spin filters for magnetoresistive RAM, by inducing segregation of carbon in metal layer to surface of metal layer.
  • 专利号:   WO2012166562-A1, CA2834891-A1, EP2715792-A1, KR2014040169-A, US2014151826-A1, US9564579-B2, EP2715792-A4
  • 发明人:   KELBER J, ZHOU M, MI J U
  • 专利权人:   UNIV NORTH TEXAS, UNIV NORTH TEXAS, UNIV NORTH TEXAS, KELBER J, ZHOU M
  • 国际专利分类:   H01L029/04, G11C011/15, H01L021/205, H01L043/00, H01L021/02, H01L043/08, C01B031/04, H01L027/22, H01L043/10, H01L043/12
  • 专利详细信息:   WO2012166562-A1 06 Dec 2012 H01L-029/04 201282 Pages: 19 English
  • 申请详细信息:   WO2012166562-A1 WOUS039487 25 May 2012
  • 优先权号:   US490650P, CA2834891, KR734050, US14115105

▎ 摘  要

NOVELTY - The method involves depositing a metal layer on a substrate by electron beam deposition, and annealing the metal layer at temperatures below 700 Kelvin for a period of time sufficient to induce segregation of carbon in the metal layer to a surface of the metal layer. USE - Method for forming one-to-four-monolayer graphene layer on metal layer in process of manufacturing, e.g., MTJ (claimed) spin filters for development of various types of non-volatile memories, such as magnetoresistive RAM (claimed). ADVANTAGE - Permits manufacture of MTJ spin filters and related devices based on graphene on silicon complementary metal oxide (Si CMOS) semiconductor devices at temperatures and conditions consistent with those preexisting structures. High tunneling magnetoresistance values for MTJ device allow much larger arrays, smaller devices, and give on/off ratio approaching or exceeding that of existing Si CMOS devices. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) an MTJ of high tunneling magnetoresistance; and (2) a magnetoresistive RAM. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of an MTJ device.