• 专利标题:   Schottky diode of semiconductor power device, has ohmic contact electrode that is formed on second substrate layer to form cathode electrode, and Schottky contact electrode is formed on graphene layer to form anode electrode.
  • 专利号:   CN110071177-A
  • 发明人:   RAN J, WEI T, YAN J, WANG J
  • 专利权人:   INST SEMICONDUCTORS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/329, H01L029/47, H01L029/872
  • 专利详细信息:   CN110071177-A 30 Jul 2019 H01L-029/872 201975 Pages: 10 Chinese
  • 申请详细信息:   CN110071177-A CN10438467 24 May 2019
  • 优先权号:   CN10438467

▎ 摘  要

NOVELTY - The diode has a substrate layer (10), and the first substrate layer (20) that is grown on the substrate layer as a template buffer layer for subsequent growth. The second substrate layer (30) is grown on the first substrate layer for growing the cathode electrode. The third substrate layer (40) is grown on the second substrate layer as an active region of the Schottky diode. A graphene layer (50) is formed on the third substrate layer. An ohmic contact electrode (60) is formed on the second substrate layer to form a cathode electrode. A Schottky contact electrode (70) is formed on the graphene layer to form an anode electrode. USE - Schottky diode of semiconductor power device (claimed). ADVANTAGE - The Schottky diode has high reverse breakdown voltage and low on-resistance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of preparing Schottky diode. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the schottky diode. Substrate layer (10) First substrate layer (20) Second substrate layer (30) Third substrate layer (40) Graphene layer (50) Ohmic contact electrode (60) Schottky contact electrode (70)