• 专利标题:   Preparing defect type graphene field emission cold cathode useful for various vacuum electronic device, comprises growing graphene on copper foil substrate surface by radio-frequency-plasma-enhanced chemical vapor deposition by changing temperature, radio frequency power and gas flow rate.
  • 专利号:   CN115058704-A
  • 发明人:   ZHANG X, LEI W, ZHAO Z, ZHAO N
  • 专利权人:   JINLING INST TECHNOLOGY
  • 国际专利分类:   C23C016/50
  • 专利详细信息:   CN115058704-A 16 Sep 2022 C23C-016/50 202291 Chinese
  • 申请详细信息:   CN115058704-A CN10648400 09 Jun 2022
  • 优先权号:   CN10648400

▎ 摘  要

NOVELTY - Preparing defect type graphene field emission cold cathode comprises (i) selecting and cleaning the copper foil substrate; and (ii) using radio-frequency-plasma-enhanced chemical vapor deposition to grow graphene on the surface of the copper foil substrate by changing the temperature, the radio frequency power and the gas flow rate. USE - The method is useful for preparing defect type graphene field emission cold cathode is useful for electronic source of various vacuum electronic device e.g. vacuum microelectronic device. ADVANTAGE - The method provides an experiment scheme of in-situ growing different defect type and excellent field electron emission performance of graphene cathode using radio-frequency-plasma enhanced-chemical vapor deposition (RF-PECVD) direct growth method by controlling the growth temperature, radio frequency power and gas flow rate.