• 专利标题:   Manufacturing method of ceramic substrate for LED, involves depositing thin film in graphene powder material absorbed surface of ceramic substrate at specific vacuum degree and at specific vacuum working environment.
  • 专利号:   CN104086223-A, CN104086223-B
  • 发明人:   LAN Y, TAN B
  • 专利权人:   HUNAN ELEMENT PASSWORD GRAPHENE RES INST, HUNAN YUANSU MIMA GRAPHENE HIGHTECHNOLO
  • 国际专利分类:   C04B041/85, C04B041/88, H01L033/64
  • 专利详细信息:   CN104086223-A 08 Oct 2014 C04B-041/85 201504 Pages: 7 Chinese
  • 申请详细信息:   CN104086223-A CN10352076 23 Jul 2014
  • 优先权号:   CN10352076

▎ 摘  要

NOVELTY - The method involves selecting graphene powder with specific surface absorbing distribution density as processing base material of ceramic substrate and vacuumizing until the vacuum degree is more than specific value. The inert gas or mixed gas of reaction gas or both is provided as carrier gas. A thin film is deposited in graphene powder material absorbed surface of the ceramic substrate at specific vacuum degree and at specific vacuum working environment. The deposition temperature is 25 to 125 degrees C. The deposition time is 120 to 5000 seconds. USE - Manufacturing method of ceramic substrate for LED. ADVANTAGE - The heat conductivity and insulation are improved. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the ceramic substrate manufacturing device. Magnetron sputtering target (4) Worktable (5) Vacuum pumping unit (6) Working gas (7) Substrate (8)