• 专利标题:   Preparing indium-phosphate thin film based on gallium-arsenic substrate, comprises e.g. growing gallium-arsenic buffer layer on gallium-arsenic substrate, preparing composite buffer layer on gallium-arsenic buffer layer, forming composite buffer layer and growing indium-phosphate thin film.
  • 专利号:   CN114134565-A, CN114134565-B
  • 发明人:   JI H, LUO S, WANG Y, XU P
  • 专利权人:   JIANGSU HUAXING OPTO TECHNOLOGY CO LTD
  • 国际专利分类:   C30B025/18, C30B029/40, H01L021/02
  • 专利详细信息:   CN114134565-A 04 Mar 2022 C30B-025/18 202279 Chinese
  • 申请详细信息:   CN114134565-A CN11325697 10 Nov 2021
  • 优先权号:   CN11325697

▎ 摘  要

NOVELTY - Preparing an indium-phosphate (InP) thin film based on a gallium-arsenic (GaAs) substrate, comprises (i) selecting a GaAs substrate (10), (ii) growing a GaAs buffer layer (20) on the GaAs substrate (10), (iii) preparing a composite buffer layer (30) on the GaAs buffer layer (20), forming the composite buffer layer by alternating growth of a graphene layer (31) and a GaxIn1-xP material layer (32), where the lowermost layer is the graphene layer, and the uppermost layer is the GaxIn1-xP material layer, and (iv) growing an InP thin film (40) on the composite buffer layer. USE - The method is useful for preparing indium-phosphate thin film based on gallium-arsenic substrate. ADVANTAGE - The method is economical. DESCRIPTION OF DRAWING(S) - The drawing shows a structural schematic view of preparing an InP thin film based on a GaAs substrate. 10GaAs substrate 20GaAs buffer layer 30Composite buffer layer 31Graphene layer 32Gaxin1-xp material layer 40InP film