• 专利标题:   In situ scanning electron microscope for graphene liquid room, has graphene copper net located between liquid beam emitted by sample and microscope, where inside of liquid body is provided with silicon sheet.
  • 专利号:   CN216696123-U
  • 发明人:   TAN L
  • 专利权人:   SHAOXING LISIYI INSTR EQUIP CO LTD
  • 国际专利分类:   G01N023/22
  • 专利详细信息:   CN216696123-U 07 Jun 2022 G01N-023/22 202249 Chinese
  • 申请详细信息:   CN216696123-U CN23152215 15 Dec 2021
  • 优先权号:   CN23152215

▎ 摘  要

NOVELTY - The utility model model claims an in situ scanning electron microscope for graphene liquid chamber and silicon sheet composite structure, belonging to the technical field of microscope liquid the liquid chamber comprises a liquid body for bearing the liquid sample and liquid sample; the body of the liquid chamber is provided with at least one graphene copper net; the graphene copper net is located between the liquid beam emitted by the sample and the scanning electron microscope; the inside of the liquid body is provided with a silicon sheet, the graphene copper net is adhered on the silicon sheet, the silicon sheet is provided with a through hole. The utility model model solves the problem that the traditional graphene liquid chamber is easy to be damaged by the graphene liquid means of the graphene copper net to the pasting technical means trigger and the graphene liquid chamber cannot be used for scanning electron microscope technology problem. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: (1) the in situ scanning electron microscope graphene liquid to claim; (2) a silicon wafer composite structure.