▎ 摘　　要

NOVELTY - A process for forming a dry electrode for measuring electrophysiological readings comprises epitaxially growing a silicon carbide film on a doped silicon substrate, depositing at least two metals on a surface of the silicon carbide film, where the two metals include first metal and second metal, heating the two metals, silicon carbide film and substrate to cause the first metal to react with silicon of the silicon carbide film to form carbon and stable silicide, and the corresponding solubilities of carbon in the stable silicide and in the second metal are sufficiently low that the carbon produced by the silicide reaction forms a graphene layer on the silicon carbide film, removing the stable silicide and unreacted first and second metals to produce a structure having doped silicon substrate and silicon carbide film with a surface layer of graphene, repeatedly contacting the surface layer of graphene with an electrolyte solution to condition the graphene surface prior to use. USE - The process is used for forming dry electrode used in system for measuring electrophysiological readings, such as electroencephalography (EEG), electrocardiography (EKG), electromyography (EMG) or electroocoulogram (EOG) machine. ADVANTAGE - The dry electrode has excellent mechanical strength and high electrical conductivity, is chemically stable, biocompatible and cytotoxic against bacteria. The electrode has equivalent or superior performance compared to existing dry electrodes and enables electrical communication between the graphene surface and metal pin button through the substrate. The process improves impedance performance of the sensors and wettability of the electrodes and reduces contact impedance between the skin. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a dry electrode for measuring electrophysiological readings comprising doped silicon substrate, silicon carbide film on the substrate, graphene surface on the silicon carbide film, where the graphene surface has undergone a functionalization and/or intercalation process to increase the amount of oxygen functional groups present.