• 专利标题:   Graphene buried radiating layer and longitudinal channel gaseous nitrogen metal insulator semiconductor FET cell structure, has substrate is made of silicon, where side wall of groove and side of hole are formed on gate dielectric layer.
  • 专利号:   CN107393890-A, CN207572358-U
  • 发明人:   DOU J, HU Y, HUANG X, LI M, NI W, NIU X, XU M, YUAN J, ZHANG J
  • 专利权人:   BEIJING HUAJIN CHUANGWEI ELECTRONIC CO
  • 国际专利分类:   H01L021/28, H01L021/335, H01L023/373, H01L029/423, H01L029/778
  • 专利详细信息:   CN107393890-A 24 Nov 2017 H01L-023/373 201801 Pages: 9 Chinese
  • 申请详细信息:   CN107393890-A CN10733462 24 Aug 2017
  • 优先权号:   CN10733462, CN21064319

▎ 摘  要

NOVELTY - The structure has a gaseous nitrogen buffer layer, an n-type heavily doped gaseous nitrogen layer, and a p-type gaseous nitrogen electron blocking layer, a non-doped gaseous nitrogen layer, and an aluminum gallium nitride barrier layer, a gate slot cell structure for extending from a top part of the cell structure unit to an n-type gaseous nitrogen layer. A side wall of a grid groove and a bottom side of a hole are formed on a gate dielectric layer. A substrate is made of silicon, Silicon carbide, aluminum nitride or Sapphire material. USE - Graphene buried radiating layer and longitudinal channel gaseous nitrogen metal insulator semiconductor FET cell structure. ADVANTAGE - The structure ensures stable turn-on operation of large threshold voltage of the device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene buried radiating layer and a longitudinal channel gaseous nitrogen metal insulator semiconductor FET cell structure preparation method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene buried radiating layer and a longitudinal channel gaseous nitrogen metal insulator semiconductor FET cell structure.