• 专利标题:   Manufacture of graphene on silicon carbide substrate involves producing double-layer carbon membrane, depositing nickel film on silicon substrate, placing carbon surface of double-layer carbon membrane on nickel membrane, and annealing.
  • 专利号:   CN102505114-A, WO2013102359-A1, US2014367642-A1, US9691612-B2
  • 发明人:   DENG P, GUO H, LEI T, ZHANG K, ZHANG Y
  • 专利权人:   UNIV XIDIAN, UNIV XIDIAN, GUO H, ZHANG K, ZHANG Y, DENG P, LEI T
  • 国际专利分类:   C23C016/26, C23C016/52, C23C016/56, C01B031/04, H01L021/02, H01L029/16, B82Y030/00, B82Y040/00, C23C014/06, C23C016/01, C23C016/02, C30B025/02
  • 专利详细信息:   CN102505114-A 20 Jun 2012 C23C-016/26 201252 Pages: 7 Chinese
  • 申请详细信息:   CN102505114-A CN10000519 03 Jan 2012
  • 优先权号:   CN10000519

▎ 摘  要

NOVELTY - Silicon carbide sample is washed, placed in quartz tube and heated. Three-neck flask filled with carbon tetrachloride liquid is heated, and carbon tetrachloride steam is subjected to quartz tube. Carbon tetrachloride is reacted with silicon carbide to produce double-layer carbon membrane. Nickel film is deposited on silicon substrate. Carbon surface of double-layer carbon membrane is placed on nickel membrane, annealed, and nickel membrane is removed from double-layer graphene sample. Thus, graphene is manufactured on silicon carbide substrate. USE - Manufacture of graphene on silicon carbide substrate. ADVANTAGE - The method efficiently and safely provides graphene for sealing gas and liquid, by simple method. DETAILED DESCRIPTION - Silicon carbide sample is washed to remove pollutants on the surface. The washed silicon carbide is placed in a quartz tube, and heated at 750-1150 degrees C. A three-neck flask filled with carbon tetrachloride liquid is heated at 60-80 degrees C, and the carbon tetrachloride steam is subjected to quartz tube using argon gas. The carbon tetrachloride is reacted with silicon carbide to produce a double-layer carbon membrane. A nickel film having thickness of 350-600 nm, is deposited on a silicon substrate. The carbon surface of the double-layer carbon membrane is placed on the nickel membrane, and placed in argon gas atmosphere. The obtained product is annealed at 900-1100 degrees C for 10-20 minutes, to produce double-layer graphene. The nickel membrane is removed from the double-layer graphene sample. Thus, graphene is manufactured on silicon carbide substrate.