• 专利标题:   Method for increasing high-k dielectric constant on graphene buffer layer utilized for manufacturing carbon-based integrated circuit, involves providing graphene thin film to grow high dielectric constant and preparing buffer solution.
  • 专利号:   CN102709177-A, CN102709177-B
  • 发明人:   SHEN Y, SUN Q, WANG P, ZHOU P, ZHANG W
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   H01L021/316
  • 专利详细信息:   CN102709177-A 03 Oct 2012 H01L-021/316 201304 Pages: 6 Chinese
  • 申请详细信息:   CN102709177-A CN10195407 14 Jun 2012
  • 优先权号:   CN10195407

▎ 摘  要

NOVELTY - A buffer layer high-k dielectric constant increasing method involves providing graphene thin film to grow high-k dielectric constant of rhodamine in ethanol, preparing organic buffer layer solution with concentration of 1-5 mg/ml, soaking graphene sample in buffer layer solution for 25-35 minutes, drying naturally at room temperature to form rhodamine organic buffer layer on the graphene layer with thickness of 1-10 nm. High-k dielectric constant is grown on organic buffer layer by an atomic layer deposition method at deposition temperature of 100-200 degrees C. USE - Method for increasing high-k dielectric constant on a buffer layer of graphene that is utilized for manufacturing a carbon-based integrated circuit.