▎ 摘　　要

NOVELTY - An ultraviolet-ray is irradiated to the surface of graphene sheet-type material (40) in the atmosphere containing active substance, to remove outermost surface layer of the graphene sheet-type material or to modify the outermost surface layer. The active substance acts on graphene sheet-type material. The electrical property of the graphene sheet-type material is changed. USE - Processing of graphene sheet-type material. Uses include but are not limited to semiconductor device, printed circuit board, graphene channel transistor, wiring for large scale integration and adhesive component of adhesive tape. ADVANTAGE - The method provides easy processing of graphene sheet-type material having desired number of layers and excellent chemical stability. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for processing apparatus, which processes to-be-processed substrate (30) in which graphene sheet-type material is formed. The processing apparatus consists of active reaction chamber provided with the gas inlet (18) and gas outlet (20), ultraviolet-ray generation light source facing the gas outlet and to-be-processed substrate mounting stage in which to-be-processed substrate is mounted. The gas containing the active substance is introduced from the gas inlet and the active substance is activated by the ultraviolet-ray from ultraviolet-ray generation light source. The active substance is sprayed on to-be-processed substrate. DESCRIPTION OF DRAWING(S) - The drawing shows schematic view of processing apparatus of graphene sheet-type material. Gas inlet (18) Gas outlet (20) To-be-processed substrate (30) Vacuum ultraviolet ray (36) Graphene sheet-type material (40)