▎ 摘　　要

NOVELTY - The method involves forming a channel (102) in a substrate (100) i.e. buried oxide (BOX) substrate. A sacrificial layer is formed in the channel. A sensor is formed with a dielectric layer (302) placed on the substrate. A graphene layer (304) is placed on the dielectric layer, and another dielectric layer (306) is placed on the graphene layer, a source region, and a gate region, where the gate region is placed on the sacrificial layer. The sacrificial layer is removed from the channel. A capping layer is placed on the sensor, the substrate, and the sacrificial layer from the channel. USE - Method for forming a sensor i.e. graphene biosensor, utilized in life sciences, clinical diagnostics, and medical research for affinity based sensing. ADVANTAGE - The method enables the dielectric layer between the fluid in the flow path and the graphene layer, so as to improve the sensitivity of the device in an easy manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a sensor comprising a dielectric layer. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of a method for forming a graphene sensor. Substrate (100) Channel (102) Dielectric layers (302, 306) Graphene layer (304)