• 专利标题:   Manufacturing large-area graphene thin film by irradiating an energy beam after forming a graphene precursor film on a substrate, and forming a catalyst layer before or after the formation of the graphene precursor film.
  • 专利号:   KR2021107945-A, KR2384916-B1
  • 发明人:   KIMYONGHWAN, KIM H C, KIM J H
  • 专利权人:   INFOVION CO LTD
  • 国际专利分类:   B01J019/08, C01B032/184
  • 专利详细信息:   KR2021107945-A 02 Sep 2021 C01B-032/184 202185 Pages: 17
  • 申请详细信息:   KR2021107945-A KR022148 24 Feb 2020
  • 优先权号:   KR022148

▎ 摘  要

NOVELTY - An large-area graphene thin film (40) is manufactured by irradiating an energy beam after forming a graphene precursor film (30) on a substrate (10), and forming a catalyst layer (20) before or after the formation of the graphene precursor film. USE - Manufacture of large-area graphene thin film. ADVANTAGE - The method can easily control the material and thickness of the film according to the composition, viscosity, coating method, and coating thickness of the graphene precursor solution, so it is easy to control the properties and thickness of the finally obtained graphene thin film, and high quality with less defects thin film can be produced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacturing a fin thin film which involves performing energy beam irradiation by arranging the energy beam sources in series and/or parallel on the substrate (10), and transferring the substrate or energy beam source in one direction to irradiate the entire substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart of the manufacturing process of graphene thin film. Substrate (10) Catalyst layer (20) Graphene precursor film (30) Graphene thin film (40)