• 专利标题:   Mask plate, has mask plate body formed with framework layer, adhesive layer and graphene layer, where mask plate body is fixed with first opening, second opening and third opening along vertical direction.
  • 专利号:   CN105425537-A, CN105425537-B
  • 发明人:   GAN S, ZHU X, WANG X
  • 专利权人:   KUNSHAN GUOXIAN PHOTOELECTRIC CO LTD, KUNSHAN GUOXIAN PHOTOELECTRIC CO LTD
  • 国际专利分类:   G03F001/50, G03F001/80
  • 专利详细信息:   CN105425537-A 23 Mar 2016 G03F-001/50 201624 Pages: 6 English
  • 申请详细信息:   CN105425537-A CN10976247 23 Dec 2015
  • 优先权号:   CN10976247

▎ 摘  要

NOVELTY - The plate has a mask plate body formed with a framework layer (1), an adhesive layer (2) and a graphene layer (3). The framework layer is formed with multiple first openings (4). The adhesive layer is formed with multiple second openings (5). The graphene layer is formed with multiple third openings (6). The mask plate body is fixed with the first opening, the second opening and the third opening along vertical direction. Opening area of the first opening is greater than or equal to opening area of the second opening. USE - Mask plate. ADVANTAGE - The plate is easy to manufacture and inexpensive, and has high quality and resolution ratio and large strength, and prevents the mask plate body from being damaged, and increases accuracy rate, and can reduce occupied space and production cost. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a mask plate manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a mask plate. Framework layer (1) Adhesive layer (2) Graphene layer (3) Openings (4,5,6)