• 专利标题:   Preparing self-supporting nitride substrate, involves providing substrate on which layer of two-dimensional material is formed, forming graphene layer, forming nitride thick film on graphene layer surface and removing graphene layer.
  • 专利号:   CN110729182-A
  • 发明人:   XU Y, WANG J, XU K
  • 专利权人:   SUZHOU NANOWIN SCI TECHNOLOGY CO LTD
  • 国际专利分类:   C23C016/02, C23C016/34, H01L021/205
  • 专利详细信息:   CN110729182-A 24 Jan 2020 H01L-021/205 202015 Pages: 6 Chinese
  • 申请详细信息:   CN110729182-A CN10950441 08 Oct 2019
  • 优先权号:   CN10950441

▎ 摘  要

NOVELTY - Method for preparing self-supporting nitride substrate, involves (i) providing a substrate on which a layer of two-dimensional (2D) material having a polarity is formed, and forming a graphene layer on the 2D material layer, where the graphene layer has a single-layer structure, and (ii) forming a nitride thick film on the surface of the single-layer graphene layer, removing the substrate by mechanical peeling, removing the 2D material layer and the graphene layer by grinding and polishing treatment, and obtaining flat nitride thick film as a target product. USE - The method is useful for preparing self-supporting nitride substrate. ADVANTAGE - The method provides high-quality self-supporting nitride substrate, realizes the growth of nitride thick films on the surface of non-defective graphene, effectively reduces defects at the interface, and improves the crystal quality of the self-supporting nitride substrate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a self-supporting nitride substrate growth structure comprising the above-mentioned substrate, graphene layer and nitride thick film.