• 专利标题:   Graphene photo-electric transistor upper flexible substrate manufacturing method, involves fixing upper di-sulfide thin film on graphene-containing layers, and fixing two electrode layers on graphene layer and upper di-sulfide thin film.
  • 专利号:   CN103531664-A, CN103531664-B
  • 发明人:   BAO Q, LI S, XUE Y
  • 专利权人:   UNIV SOOCHOW
  • 国际专利分类:   H01L031/18
  • 专利详细信息:   CN103531664-A 22 Jan 2014 H01L-031/18 201421 Pages: 7 Chinese
  • 申请详细信息:   CN103531664-A CN10518367 28 Oct 2013
  • 优先权号:   CN10518367

▎ 摘  要

NOVELTY - The method involves fixing a gate electrode layer on a flexible plastic substrate by using a printing or magnetic control sputtering process. An upper gate electrode layer is covered on an insulating medium layer. Multiple graphene-containing layers are formed on the insulating medium layer by using a printing process. A di-sulfide thin film layer is fixed on an upper graphene layer. An upper di-sulfide thin film is fixed on each graphene-containing layer and a gate dielectric layer. Two electrode layers are fixed on a graphene layer and the upper di-sulfide thin film. USE - Graphene photo-electric transistor upper flexible substrate manufacturing method. ADVANTAGE - The method enables manufacturing a graphene photo-electric transistor upper flexible substrate at low cost. DETAILED DESCRIPTION - The insulating medium layer is made of silicon nitride, silicon oxide, hafnium oxide or aluminum oxide. DESCRIPTION OF DRAWING(S) - The drawing shows a partial sectional view of a graphene photo-electric transistor upper flexible substrate.