▎ 摘　　要

NOVELTY - The method involves forming board layer on substrate. The concentration of carbon containing gas (300) is enhanced, and the PECVD is performed. The growth direction of the graphene grown in the given area of the board layer is the parallel direction. The megacryst is formed by graphene (500). The pressure control valve opening and needle opening are provided. USE - Manufacturing method of noncatalytic substrate growth graphene. ADVANTAGE - The manufacturing cost of the substrate growth graphene is reduced efficiently. The substrate growth graphene is efficiently manufactured. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view illustrating the manufacturing method of the noncatalytic substrate growth graphene. Board layer (100) Carbon-containing gas (300) Graphene (500)