▎ 摘　　要

NOVELTY - The pipeline module (100) comprises a smaller receiving space than the first gas storage tank while maintaining an ultrapure state having a concentration of 99.9999% or more of a gaseous state. One end of pipeline (120) is connected to the first gas storage tank and the other end of which is connected to the second gas storage tank. One valve (140) is installed in the pipeline for controlling the supply amount of the gas passing through the pipeline. A fastening element (160) connecting the pipelines to each other and the pipeline and the valve. A graphene coating layer is coated on at least one surface of the pipeline, valve and fastening element. USE - Pipeline module for ultra-high purity gas storage. ADVANTAGE - The micropattern spacing of wires is rapidly decreasing from micro to nano units for the design of microcircuits, so that ultra-pure gas is stably stored and transported to realize micropatterns. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of a pipeline module for ultra-high purity gas storage. (Drawing includes non-English language text). First gas storage tank (10) Pipeline module (100) Pipeline (120) Valve (140) Fastening element (160)