• 专利标题:   Graphene infrared sensor i.e. quantum sensor, has photonic crystal layer formed in remaining part of upper surface of electrode layer, in upper surface of material layer and in remaining part of upper surface of silicon wafer.
  • 专利号:   HK1231319-A2
  • 发明人:   LAI W, LO W, TANG X, POON C, CHENG W
  • 专利权人:   HONG KONG PRODUCTIVITY COUNCIL
  • 国际专利分类:   H01L000/00
  • 专利详细信息:   HK1231319-A2 15 Dec 2017 H01L-000/00 201808 Pages: 24 Chinese
  • 申请详细信息:   HK1231319-A2 HK112876 09 Nov 2016
  • 优先权号:   HK112876

▎ 摘  要

NOVELTY - The sensor has a silicon wafer provided with a nanographene photosensitive material layer. An electrode layer is formed directly in a part of an upper surface of the silicon wafer. The nanographene photosensitive material layer is formed in a part of an upper surface of the electrode layer and in the part of the upper surface of the silicon wafer. A photonic crystal layer is formed in a remaining part of the upper surface of the electrode layer, in an upper surface of the nanographene photosensitive material layer and in a remaining part of the upper surface of the silicon wafer. USE - Graphene infrared sensor i.e. quantum sensor. ADVANTAGE - The sensor improves a light response rate as a nano-graphene material as a photosensitive material is used and a photonic crystal is added to aggregate specific wavelength infrared ray. The sensor reduces cost by utilizing a simple preparation process. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene infrared sensor.