• 专利标题:   Graphene growth method used for increasing the nucleation density of graphene, involves providing germanium substrate, performing ion implantation on germanium substrate, annealing, providing carbon source and growing.
  • 专利号:   CN107653446-A
  • 发明人:   DI Z, MA J, ZHANG M, WANG G, JIA P, WANG Z, WANG X
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   C23C016/02, C23C016/26
  • 专利详细信息:   CN107653446-A 02 Feb 2018 C23C-016/02 201818 Pages: 9 Chinese
  • 申请详细信息:   CN107653446-A CN10591642 26 Jul 2016
  • 优先权号:   CN10591642

▎ 摘  要

NOVELTY - Graphene growth method comprises providing germanium substrate, performing ion implantation on germanium substrate, annealing to deposit implanted ions in germanium substrate to increase the nucleation site of graphene on the surface of germanium substrate, providing carbon source and growing graphene on the surface of germanium substrate. USE - Method for carrying out graphene growth used for increasing the nucleation density of graphene (claimed). ADVANTAGE - The method greatly increases the growth rate of graphene; is good for reducing the production cost of graphene; and can modulate the nucleation density of graphene by adjusting the ion implantation dose and implantation energy.