▎ 摘 要
NOVELTY - The novel graphene light modulator structure design comprises an artificial metamaterial waveguide layer (2) of the structure that is buried in the substrate layer (1). The double graphene layer (3) located above the artificial metamaterial waveguide layer. The ultra-thin optical waveguide layer is located above the double-layer graphene layer. The low refractive index cap layer (5) covers the ultra-thin optical waveguide layer. The double-layer graphene layer is sequentially composed of a first dielectric filled layer (31), a first graphene layer (32), a second dielectric filled layer (33), a second graphene layer (34), and a third dielectric filling layer (35). The first electrode is deposited on the upper end surface of the extended portion of the second graphene layer. The second electrode is deposited on the first graphene layer. USE - Novel graphene light modulator structure design. ADVANTAGE - The device has large operating bandwidth, and high modulation rate and compact structure, which provides an effective solution for building a large bandwidth, high density integration, and high speed system on chip. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a novel graphene light modulator structure design.