▎ 摘 要
NOVELTY - The method involves forming a carbon containing layer on a base layer (1) by an atomic-layer-deposition method. The amorphous carbon layer is formed from the carbon containing layer. The graphene (11) is formed from the amorphous carbon layer. The temperature in a first heat treatment operation is 600 degrees C or less. The number of the aromatic rings contained in the monomer which comprises the polymer when the carbon containing layer contains a polymer is one or less. The self-organization unimolecular layer is formed between the base layer and the carbon containing layer. USE - Method for manufacturing graphene. ADVANTAGE - The graphene of a uniform film thickness is manufactured, as the amorphous carbon layer is formed from the carbon containing layer, and the graphene is formed from the amorphous carbon layer. DETAILED DESCRIPTION - The method involves bonding the functional group contained in the self-organization unimolecular layer and the functional group contained in the carbon containing layer. The self-organization unimolecular layer is formed in a vacuum for the formation of the self-organization unimolecular layer, and the carbon containing layer. The operations from carbon containing layer formation to the first heat treatment operation are continuously performed in a vacuum. The operations from first heat treatment operation to second heat treatment operation are continuously performed in a vacuum. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view illustrating the heat treatment method. Base layer (1) Sapphire substrate (3) Graphene (11)