• 专利标题:   Device used to deposit graphene, carbon nanotubes and other coating, preferably carbon on strip-shaped element, comprises heat transfer-inhibiting unit placed between process zone and inlet opening and/or an outlet opening.
  • 专利号:   DE102018110350-A1
  • 发明人:   JOUVRAY A
  • 专利权人:   AIXTRON SE
  • 国际专利分类:   C23C016/26, C23C016/54
  • 专利详细信息:   DE102018110350-A1 31 Oct 2019 C23C-016/54 201989 Pages: 21 German
  • 申请详细信息:   DE102018110350-A1 DE10110350 30 Apr 2018
  • 优先权号:   DE10110350

▎ 摘  要

NOVELTY - Device comprises a heat transfer-inhibiting unit arranged between a process zone (5) and an inlet opening (12) and/or an outlet opening with which a heat transport from the process zone to the inlet opening or the outlet opening is reduced. The device deposits graphene, carbon nanotubes or other coatings, in particular carbon, on a strip-shaped part entering from a reactor housing (1) through the inlet opening into a reactor housing and emerging strip-shaped endless substrate (2) through an outlet opening in a transport direction of the inlet opening transported through the reactor housing and from a tempering device (8) tempered process zone is transported to the outlet opening. USE - The device is useful for depositing graphene, carbon nanotubes and other coatings, preferably carbon on strip-shaped element (claimed). DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the device. Reactor housing (1) Strip-shaped endless substrate (2) Process zone (5) Tempering device (8) Inlet opening (12)