• 专利标题:   Graphene nano-structure electronic device preparation method, involves forming medium material on surface of substrate, forming graphene on surface of substrate, and forming rest disconnected graphene in outer side of graphene area.
  • 专利号:   CN104701146-A, CN104701146-B
  • 发明人:   GU C, LI J, JIN A, YANG H, TANG C, JIANG Q
  • 专利权人:   CHINESE ACAD SCI PHYSICS INST
  • 国际专利分类:   B82Y010/00, H01L021/04, H01L029/16
  • 专利详细信息:   CN104701146-A 10 Jun 2015 H01L-021/04 201560 Pages: 14 Chinese
  • 申请详细信息:   CN104701146-A CN10064601 06 Feb 2015
  • 优先权号:   CN10853979, CN10064601

▎ 摘  要

NOVELTY - The method involves forming an insulation medium material on a surface of a substrate. A continuous graphene (50) is formed on the surface of the substrate. The continuous graphene is formed with a metal electrode (40). The continuous graphene is covered with a resist layer. The resist layer is formed as a predetermined mask-shaped structure. Pattern of the mask is formed in a graphene area. A nanometer structure (20) is formed in the graphene area. A rest disconnected graphene (51) is formed in an outer side of the graphene area. USE - Graphene nano-structure electronic device preparation method. ADVANTAGE - The method enables performing graphene nano-structure electronic device preparing process with high processing precision and consistency. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene nano-structure electronic device. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a graphene nano-structure electronic device. Nanometer structure (20) Metal electrode (40) Continuous graphene (50) Rest disconnected graphene (51)