• 专利标题:   Roll-to-roll graphene film production system, has feeding transition cavity, high temperature process cavity and discharging transition cavity connected with sliding seat, where sliding seat is connected with fixing device for fixing substrate.
  • 专利号:   CN218779017-U
  • 发明人:   LIAO R, JU Y, YI J, WANG W, WANG D
  • 专利权人:   CHONGQING GRAPHENE INST
  • 国际专利分类:   C23C016/26, C23C016/54
  • 专利详细信息:   CN218779017-U 31 Mar 2023 C23C-016/26 202332 Chinese
  • 申请详细信息:   CN218779017-U CN23063256 18 Nov 2022
  • 优先权号:   CN23063256

▎ 摘  要

NOVELTY - The utility model relates to the graphene field of film preparation, claims a roll-to-roll graphene film production system, comprising a high temperature process cavity vertically set and a gas supply unit connected to the high temperature process cavity, the high temperature process cavity of the top part and the bottom are respectively provided with a feeding transition cavity and a discharging transition cavity, between the feeding transition cavity and the high temperature process cavity is provided with a feeding sealing component for closing the high temperature process cavity top part between the discharging transition cavity and the high temperature process cavity is provided with a discharging sealing component for closing the bottom of the high temperature process cavity, the feeding transition cavity, the high temperature process cavity and the discharging transition cavity are vertically and slidingly connected with a sliding seat, the sliding seat is connected with a fixing device for fixing the substrate. The utility model solves the problem that the efficiency is low and it is easy to scald in the graphene technology.